| 摘要: |
| 简述了压阻悬臂梁的工艺流程，在力学参数的测试中，利用原子力显微镜，测得杨氏模量约为133GPa；在力电耦合特性的测试中，原子力显微镜探针对悬臂梁自由端步进下压，利用半导体参数测试仪，测得悬臂梁的位移灵敏度为 ，力灵敏度为 。另一方面，与Coventorware模拟结果相比，灵敏度实验值大约是模拟值的1.4倍，与理论值近似，说明当硅悬臂梁厚度进入纳米尺寸后，量子效应和表面效应明显，压阻效应增强。 |
| 关键词: 悬臂梁 压阻效应 杨氏模量 灵敏度 |
| DOI： |
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| 基金项目:国家重点基础研究发展计划资助项目（2006CB300404），国家863项目资助（2007AA04Z301） |
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| Fabrication and Characterization Research of Piezoresistive Cantilever Beam |
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| Abstract: |
| The fabrication process of piezoresistive cantilever beam is presented briefly. Using the AFM, the young modulus of mechanical properties is known as about 133GPa; with the method of pressing cantilever beam tip by AFM tip, we can know displacement sensitivity and force sensitivity is , respectively through semiconductor characterization instrument. The experimental results show that doping concentration affect young modulus of silicon greatly. On the other hand, comparing with simulative results of Coventorware, the experimental results of sensitivity, which is the same with theory nearly, is 1.4 times than simulation, and shows that when cantilever beam’s width is scaled down to nanometers, quantum effect and surface effect becomes obvious, moreover, piezoresistive effect becomes more evident. |
| Key words: Cantilever Beam Piezoresistive effect Young modulus Sensitivity |